Intel SRK02 Core™i7-1165G7 (formerly Tiger Lake) 10 nm SuperFin FinFET Process Advanced CMOS Essentials

Product Code
ACE-2010-801
Release Date
20/01/2021
Availability
Published
Product Item Code
INT-SRK02
Device Manufacturer
Intel
Device Type
Applications Processor
Subscription
Logic
Channel
Logic - Process
Report Code
ACE-2010-801
The Intel SRK02 Corei7-1165G7 (Tiger Lake)was built on 300 mm wafers using Intel’s third generation 10 nm finFET HKMG CMOS process. The complete ACE deliverable includes a concise analysis summary report of critical device metrics, transmission electron microscopy (TEM) based energy dispersive X-ray spectroscopy (TEM-EDS) results, and salient features supported by the following image folders:
  • Downstream product teardown
  • Package X-rays, top metal and poly die photographs
  • Transmission (TEM) and (SEM) bevel through the logic region and SRAM
  • SEM cross section of the general device structure, metals, dielectrics, and detail of the FEOL structures
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