The LIS331DL is the smallest of STMicroelectronics's 3-axis smart motion sensors with SPI/I²C digital interface. Manufactured 100% in ST and housed in a 3x3x1 mm3 LGA-16 package, this sensor measures acceleration in a ±2/±8g range. Chipworks MEMS Process Review will take you inside the MEMS structure and architecture to show you how the device is fabricated.