2026-03-27 - Scanner & Stepper shipments growth continues into 2026

WFE scanner and stepper shipments declined in 2025, driven by weaker demand for KrF and ArF tools, while EUV and High‑NA systems continued to grow.

Wafer Fab Equipment Scanner & Stepper shipments are categorized into various types of lithography technologies that include i-line, KrF, ArF, ArF-dry, ArF-imm, Conv. EUV, and Hi-NA. Stepper unit shipments represent the number of steppers shipped by the equipment manufacturer. TechInsights uses many different sources of data such as public annual and quarterly financial reports, individual company reports, direct feedback from suppliers, and independent analysis. This is then triangulated to align with market share revenues, equipment forecasts to forecast WFE Scanner Shipments.