This report presents a Process Review of the F791574 die found inside the Texas Instruments X66AK2E05XABD25 multi-core DSP + ARM KeyStone II SoC. The report includes a detailed SEM analysis of the metal, dielectrics, and vias, as well as TEM analysis of the logic, I/O and SRAM transistors. The X66AK2E05XABD25 is a DSP based on Texas Instruments’ KeyStone II multi-core SoC architecture, incorporating the ARM Cortex-A15 processor single-core or quad-core CorePac and C66x DSP core. It can run at a core speed of up to 1.4 GHz.