This report is a process review of the Texas Instruments DLP4710 digital micromirror device (DMD). The DLP4710 is a digitally controlled MOEMS used as spatial light modulator for digital projectors and displays. This report contains the following detailed information:

Selected package photographs, package X-rays, die markings, and die photographs

Scanning electron microscopy (SEM) plan-view and cross-sectional micrographs of the die general structure, dielectrics, metals, vias, contacts, transistors, SRAM cells, and MOEMS structures

Transmission electron microscopy (TEM) cross-sectional images of the dielectrics, metals, vias, contacts, transistors, and MOEMS structures

Spreading resistance analysis (SRA) doping profiles of the Si die wells, epitaxial layer, and bulk

Measurements of vertical and horizontal dimensions of major microstructural features