Availability
Published
Product Code
IPR-1103-801
Release Date
Product Item Code
TOS-TCM5103PL
Device Manufacturer
Toshiba
Device Type
CMOS Image Sensor
Toshiba TCM5103PL HEW4 1.4 µm BSI CMOS Image Sensor with TSV - Imager Process Review Report
This is an Imager Process Review of the Toshiba 1.4 µm BSI CMOS image sensor extracted from the Fujifilm F550 EXR. In addition to being back illuminated, the device features a diagonal pixel array and novel use of TSV's. This report provides a thorough layout and cross-sectional analysis of the general logic and pixel to help understand how the sensor is fabricated. The focus is on the elements specific to image sensors such as microlenses, color filters, pixel architecture, and photocathode. Analysis of the pixel is parallel and perpendicular to the column outline, to show the structure of the pixel array elements. Detailed images focus on the aperture, transistor gate structure, anti-reflective coatings, and photocathode.
 

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