TThis process review focuses primarily on the DRAM cell transistor and capacitor and provides a detailed analysis of the structure and materials. The report also includes a higher level process analysis of the periphery logic aside from the DRAM cell.
The report includes:

• Major Findings
• Device Identification
• General Structure
• Detailed Structure - Active Direction
• Detailed Structure - Wordline Direction
• Memory Capacitor Structure Cross Section
• Memory Cell Layout
• Capacitor Materials Analysis
• Logic Between Memory Blocks