The Freescale MPC8548ECPXAUJA integrated processor is manufactured in Freescale’s 90 nm SOI process technology.

This report provides a full die level process analysis of the device, based on detailed TEM and SEM cross-sectional analyses, and includes information typically needed for advanced technology teams to understand the latest devices. The scope of analysis includes transistors, metals, dielectrics, and device passivation. Selected analyses of layout features, such as memory cells, logic cells, and dummy metal features are included, as well as materials analysis.