Obtain the Chipworks “Inside Technology” view of the KXM52 tri axis accelerator. The unique benefits of the KXM52 have been acknowledged by an industry leader, Samsung, through the KXM52 design win in Samsung’s SCH-S310 cellular phone.

According to the KXM52 datasheet , and confirmed by Chipworks’ analysis, the Kionix KXM52 is a silicon micro-machined three-axis linear accelerometer and inclinometer consisting of the XLM sensor element and an application specific integrated circuit. This report is a MEMS process review of the Kionix KXM52 tri-axis (XYZ) accelerometer and inclinometer sensor. This report provides a full process review analysis of the XLM accelerometer sensor MEMS device, and a basic analysis of the associated ASIC die.