STMicroelectronics FDA801B-VYY BCD9S Process Technology Process Review

Product Code
PPR-1803-801
Release Date
07/05/2018
Availability
Published
Product Item Code
STM-FDA801B-VYY
Device Manufacturer
STMicroelectronics
Device Type
Audio Amplifier
Subscription
Power Semiconductor
Channel
Power Semiconductor - Power Essentials
Report Code
PPR-1803-801
This report presents a Process Review of the 0.13 µm BDC9S process technology found in the STMicroelectronics FDA801B-VYY automotive 4 x 50 W class-D digital input power amplifier (PA) with I2C diagnostics. It integrates a DAC and can operate with a supply voltage as low as 6 V.

This report contains the following detailed information:
  • Selected teardown photographs, package photographs, package X-rays, die markings, and die photographs
  • Scanning electron microscopy (SEM) cross-sectional micrographs of the general structure of the die, including dielectric materials, metals, major features, and transistors
  • Transmission electron microscopy (TEM) cross-sectional micrographs of the general structure of the die, including dielectric materials, metals, major features, and transistors
  • Scanning capacitance microscopy (SCM) and scanning microwave impedance microscopy (sMIM) images of the dopant structures
  • Spreading resistance profiling (SRP) was performed in three areas of the die to provide quantitative measures of the substrate doping
  • Measurements of vertical and horizontal dimensions of major microstructural features
  • Plan-view optical micrograph of the die delayered to metal 3, polysilicon and diffusion
  • Identification of major functional blocks on a diffusion die photograph
  • Table of functional block sizes and percentage die utilization
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