TSMC 28 nm eFlash (Renesas RH850/U2A8) Process Flow Analysis

Analysis of the process flow and integration used in the manufacture of the Renesas automotive microcontroller R7F702301BEBBA-C_BC6 comprising a Renesas R7F702301B die, built in TSMC 28 nm embedded flash memory technology. The spreadsheet lists the hundreds of process flow steps required in its manufacture.

Read the full report