Sony IMX591, 0.01 MP Resolution, 10.1 μm Pixel Pitch Stacked Back-Illuminated Direct-Time of Flight (d-ToF) SPAD Sensor Device Essentials Folder
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This is a device essentials folder (DEF) of Sony IMX591, 10.1 µm pixel pitch, stacked back-illuminated direct-Time of Flight (d-ToF) SPAD sensor, extracted from the Apple iPhone 15 Pro Max LiDAR camera. This IMX591 die features inverted pyramid structures formed on the backside of the CIS active Si, tungsten (W)-filled full depth back deep trench isolation (B-DTI) and composite metal grid (CMG).
