onsemi Automotive M3S EliteSiC 1200V SiC Process Flow Analysis

This report provides an analysis of the process flow and integration used in the manufacture of the onsemi NVH4L022N120M3S Automotive M3S EliteSiC 1200 V 22 mΩ N-Channel SiC Power MOSFET module. The module is optimized for automotive on-board chargers and DC-DC converters for EV/HEV. The spreadsheet lists the hundreds of process flow steps required in its manufacture.

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