Memory Detailed Structural Analysis of the Micron 16 nm NAND Flash Memory

Published: 23 May 2014

This report is a detailed structural analysis (MDSA) of the Micron 16 nm node NAND Flash memory (Intel L95B 2012(M)(C) die markings). At 16 nm, this device is not only the most advanced Flash memory produced to date, it also features the most advanced processing node of any semiconductor device. Target applications include: consumer SSDs, USB drives and Flash cards, tablets, ultrathin devices, mobile handsets and cloud storage. The device is fabricated using a three metal (W metal 1, Cu metal 2, Al metal 3), metal control gate, composite hi-k/oxide interpoly dielectric (IPD), polysilicon floating gate, oxide filled STI, 16 nm CMOS process. Micron continues to be the only Flash memory maker using a planar control gate/IDP/ floating gate structure for its NAND cells. An impressive 128 cells are included in the NAND string. The NAND array features a 32 nm bitline pitch, 40 nm word line pitch and 0.0013 µm2 cell area. The reported results are derived from scanning electron microscope (SEM), transmission electron microscope (TEM), energy dispersive X-ray spectroscopy (TEM-EDS), electron energy loss spectroscopy (TEM-EELS) and spreading resistance profiling (SRP).

Other Structural / Process Reports Search All Reports

Recent OMR Reports

  • Report  |  0914-37459-O-4SL1-100  |   Published: 7 October 2014
    This report provides a brief technical snapshot of the STMicroelectronics VN5016AJ Single Channel High-Side Driver. The report includes: High resolution optical images of the package top and bottom, x-ray...
  • Report  |  0814-36521-O-6CV-100  |   Published: 30 September 2014
    This CircuitVision report provides a set of hierarchical schematics for the Broadcom BCM59039 Power Management IC's. The circuit block extracted and analyzed for the report includes the buck converter...
  • Report  |  0914-37683-O-4ML1-100  |   Published: 9 September 2014
    This report provides a brief technical snapshot of the Peregrine Semiconductor PE42420 RF Switch. The report contains high resolution optical images of the package top and bottom, an x-ray image of the...