Logic Detailed Structural Analysis of the Intel 22 nm ValleyView Atom Z3740

Published: 28 April 2014

This report is a detailed structural analysis (LDSA) of the Intel(R) AtomTM Z3740 processor. The Z3740 is a power efficient quad-core system on chip (SoC) designed for Windows and Android tablets. This 1.33 GHz clocked SoC is a member of Intel’s Bay Trail-T platform. The processor cores are based on Intel’s Silvermont architecture. The Z3740 is fabricated using nine levels of metallization, dual-gate dielectric, 22 nm SoC process. The device features 90 nm minimum pitch HKMG FinFET transistors. Silicon source/drain regions are used for the NMOS transistors and SiGe for the PMOS transistors. High voltage transistors feature an increased gate dielectric thickness as compared to standard logic and SRAM. MIM capacitors are formed between the metal 8 and metal 9 interconnect levels. The Z3740 has 6T SRAM (0.108 µm2 cell size) and 8T SRAM. An analysis of the 6T SRAM is included in this report. The reported results are derived from scanning electron microscope (SEM), transmission electron microscope (TEM), energy dispersive X-ray spectroscopy (TEM-EDS), electron energy loss spectroscopy (EELS) and spreading resistance profiling (SRP).

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